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VACUUMSOLUTION EXPEr!真室解決方案右家
WWW.JUZTECH.COM
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杭州久鋒技木有限公司HANGZHOU JIUZHENG TECHNOLOGY CO. LTD.
01 美千久浄 PAGE 03-08 ABOUT JUZTECH
公司筒介 COMPANY PROFILE公司菜誉 COMPANY HONOR度用銕域 APPLICATIONS友展廂程 DEVELOPMENT HISTORY
02 芹品介韶 PAGE 09-24 PRODUCT INTRODUCTION
| S!奈列千式等径変距螺打単奈机担 | SV SERIES-EOUAL DIAMETER VARIABLE PITCH SINIGLE DRY SCREW PUMP SET |
| S!RIS!H奈列千式等径変距螺杵真室豪机祖 | SVRISVH SERIES-EOUAL DIAMETER VARIABLE PITCH DRY SCREW VACUUM PUMP SET |
| SFR丞列千式増弼螺千真空奈机塑 | SFR SERIES ENHANCED DRy SCREW VACUUM PUMP SET |
| SCR奈列千式鬘合I式真空奈机祖 | SCR SERIES COMPOSITE CLAW DRY VACUUM PUMP SET |
| SNR奈列千式多叡岑茨真室奈机塑 | SMR SERIES MULTI STAGE ROOTS DRY VACUUM PUMP SET |
| JD豪列千式双申机螺杵真空奈机塑 | JD SERIES DUAL MOTOR DRY SCREW VACUUM PUMP SET |
| S丞列千式変径変距螺千単奈机望 | SX SERIES VARIABLE DIAMETER VARIABLE PITCH SINGLE DRY SCREW PUMP SET |
| SXH系列千式変径変距螺杵真空奈机塑 | SXH SERIES VARIABLE DIAMETER VARIABLE PITCH DRY SCREW! VACUUM PUMP SET |
| JF奈列千式軸冷双亟型螺打真空袞机祖 | JF SERIES SHAFT COOLED DUAL DRIVE DRY SCREW VACUUM PUMP SET |
| UJM奈列超高真室隻合分子豪 | UJM SERIES ULTRA HIGH VACUUM COMPOSITE MOLECULAR PUMP |
| UCM系列磁忌浮須合分子烹 | UCM SERIES MAGNETIC LEVITATION COMPOSITE MOLECULAR PUMP |
ABOUT JUZTECH 笑手久
真空解决方案麦家
公司筒介
COMPANY PROFILE
杭州久箏技木有限公司(英文簡称JuZ?ech)成立于2018年, 位于夙景秀嗣的人同天堂”一杭州，是一家集真空装髷的研麦没辻、智能制造、鎖髻服矛、位用定制手一体的高新技木企巫。乗持\*菟能酥保，高数穏定”的亡品与服努定位，久争技木致力于成全球筮先的真空解决方案服矛商。
公司茂品麦注于千式无油真空装髷，戸汪的位用于半尋体，光伏，理申新能源，制菊化工?宍強科研航空航夭等行巫域。公司押有超30000平方米的生茂基地，同肘引入了世界筮先的奥地利FL加工中心、德国KAPP数控床等先辻的加工没魯。久争技木集聚了国内外各楽麦巫人オ，塑成了高救的研、鎖魯和竪菖管理圜 目前共有麦明及没辻利100余。
Hangzhou Jiuzheng Technology C.. LTDlreferred to as "Juztech' was established in 2018, located in the beautiful "Paradise on Earth" Hangzhou. Juztech is a high-tech enterprise that integrates R8D, intelligent manufacturing, sales Services, and application customization of vacuum equipment. Adhering to the product and Service philosophy of "Energy Saving ＆ Environmental, Efficient and Stable', Juztech is committed to becoming the world's leading vacuum Solution provider.
Juztech products focus On dry oil-free vacuum equipment and are Widely applied in industries such as semiconductors, photovoltaic Lithium new energy, Pharmaceutica! ＆ Chemical R& D, Aerospace etc. We have a production base 0í over 30,000 Square meters, and have also introduced advanced processing equipment Such as the world's leading Austrian WFL machining Center and German KAPP CNc lathe.We gather Various professional talents from international platforms, forming an efficient R8D, Sales and management team. Currently. We Own over 100 invention and design patents.
ス承技ボ
公司菜智
COMPANY
100+国家麦利
PRODUCT NTRODUCTION 茂品介招
真空解决方案麦家
先辻的千式螺杯真室技木 ADVANCED DRY SCREW VACUUM TECHNOLOGY
- 高数的塑合密封没辻 EFFICIENT COMBINED SEAL DESIGN
根据客戸的位用需求 量身定制先辻的塑合密封 使用寿命長 実斑高数密封性能
可以黠合勾体密封吹打 防止呰酪和軸承受到汚染真空完全无油
. According to different application requirements, the advanced combined seal can be customzed to achieve long service life and high efficiency sealing performance
. It can be combined with gas seal purging to protect gears and shafts from contamination, and the vacuum environment is completely oil-free
- 長寿命周期軸承和潤滑没辻 LONG LIFE CYCLE BEARING AND LUBRICATION DESIGN
与世界一流的軸承品牌供度商察密合作共同刑麦和授辻軸承方案 提高軸承使用寿命和可暈性
歯輜和軸承采用高椋准的真空没餡麦用油淘滑 準周期兵 油品性能穏定
Cooperate closely with World-leading bearing brand suppliers to jointly develop and design bearing solutions ü0 Improve bearing service life and reliability
. Gear and bearing are lubricated with high standard vacum pump specia! oil to ensure long maintenance interval and stable oil performance
3 先辻的温度和圧力控制技木
ADVANCED TEMPERATURE ANDPRESSURE CONTROL TECHNOLOGY押有酥水温技木 可以有数改善綬餡温度控制押有先辻的内圧可週技木 可以通泣独特没辻的旁通結杓提高八粗真室到中高真室的全圧力段活位性
.With closed-loop water cooling temperature control technology. it can effectively control and improve the P山mp temperature
With advanced interna pressure adjustable technology. it ?an improve the adaptability ? the full pressure section from rough Vacuum to medium-high Wacuum through ヨ unique design ?í bypass structure
4 高数低曝毘机和躯劫技木HIGH-EFFICIENCY と LOW-NOISEMOTOR AND DRIVE TECHNOLOGY配置高数的申机和躯劫技木 伐化不同工芝下的華矩性能力客戸帝使用成本
水冷式申机采用整体密封授辻 提高授番的透行可壺性」 降低透行喋音
.With high-fficiency motor and drive technology, it can optimize torque performance under different processes セ Save Costs for Users
The Water-cooled motor adopts the overall sealing design Improve the runing relability of the pump and reduce the noise leve
5 先避的型幾和結杓没辻
ADVANICED PROFILE ANID STRUCTURE DESIGN
多祥性的型授辻 力客戸不同位用提供高性能、 低燥音的鞋子型解决方案。 先辻的等径変距、 変変距以及須合螺杵珣可実珈
高精密加工制造和先辻的工芝技木 羂助案斑音品的可壷性和性能的一致性
可的支撹結杓授辻 辛品具有根弼的粉坐和液体処理能力遣合苛刻工芒
Diversified profile design can provide high-performance and low-noise rotor profile solutions for different process applications. Advanced equal-diameter & Variable-pitch rotor. Wariable-diameter a variable-pitch rotor and composite Screw all can be realized . High-precision machining ＆ manufacturing and advanced technology Can help t0 achieve product reliability. and performance Consistency
With reliable support structure design, the pump has strong dust and liquid handling capacity, and it is suitable for harsh processes
ス承技ボ
SV烝列千式等徭変距螺杵単奈机塑
SV SERIES-EOUAL DIAMETER UARIABLE PITCH SINGLE DRY SCREW PUMP SET
常却千式螺杵真空奈的単奈机塑 造合中小工芒腔宣接抽真空的位用 包括理申 化工医珣、 鉄冶 炉等。 抽速: 8 0 { ~ } 2 5 0 0 m ^ { 3 } / { h } 中 及限圧力: <1 Pa.abs.
Single pump unit Of conventional dry screw vacuum pump, Suitable for small and medium-sized process cavity direct vacuum applications, including lithium, Chemical medicine, Steel smelting and $0 on. Pumping speed. 80-2500 m3/h, Uitimate pressure: < 1 Pa.abs.
机型 Models: Sy80. Sv180. Sy200. Sy300. Sy380. SV450. Sv680. Svg50. Sv1200. Sy1500. SV2500
SVRISVH烝列千式等変距螺杵真室奈机塑
VRISVH SERIES-EOUAL DIAMETER UARIABLE PiTCH DRY SCREW UACUUM PUMP SET
SVRH家列 来用岑茨奈+千式螺杵真室豪的多段抽室机担 常只2段、段式真空豪: 位用遣位性正 若能、粉坐和液体理能力弼。透用于常却抽空、拉晶、 鯉申及部分ALD等位用。 抽速： 782-7252m?h; 板限圧力: <=slant 0 . 1 Pa.abs.
SVR!H series adopts Roots pump ^ + dry screw vacuum pump multi-stage pumping unit, Common? stage. 3 stage Vacuum. pump, Wide application adaptability, energy saving, dust and tiquid handling capacity. Suitable for routine evacuation, crystal pulling, tithium battery and Sorrie ALD applications. Pumping speed! 782-7252 m3h, Uitimate pressure: <=slant 0 . \dot { 1 } \mathsf { P } . abs.
L型 Models: SVR782. SVR1382. SVR1682 SH2202. SVH4202. SVH4952. SVH6002. SVH6302. SVH725
SFR系列千式増弼螺杵真室奈机塑
SFR SERIES ENHANCED DrY SCREW UACUUM PUMP SET 来用岑茨豪+増弼型千式螺杵真空奈的机塑 千奈理粉坐能力較弼 旦熟穏定性高、 更加苫能， 進 合CVD ALD等工芝睦工芒的位用。 抽速: ó52-6052 m ^ { 3 } / h 桜限圧力: <=slant 0 . 1 Pa.abs. Using Roots pump ^ + enhanced dry SCreW! Yacuurm pump unit, Dry pump has strong dust handing abiity, high thermal Sstability. miore energy Saving, suitable for cVD, ALD and other process cavity process applications. Pumping speed. 652-6052 m3/h, Uitimate pressure: <=slant O.IPa.abs.
机 型 Models: SFR652. SFR1252. SFR1852 SFR3052. SFR4552. SFRE052
SCR系列千式須合爪式真室奈机祖SCR SERIES COMPOSITE CLAW DRY VACUUM PUMP SET
采用岑茨丞 ^ { + } 千式須合爪型真空奈的机塑; 具有較弼的処理粉坐昇物能力 進合CVD等位用. 抽速： 6 1 0 - 6 0 5 0 m ^ { 3 } / h 中ア 及限圧力： <=slant 0 . 1 Pa.abs. Using Roots pump ^ + dry compound claw vacuum pump unit, Has a strong ability to handle dust foreign bodies. Suitable for CVD and other applications. Pumping speed. 610-6050 m31h, Ultimate pressure <=slant O. Pa.abs.
机型 Models: SCR610. SCR1210. SCR1820. SCR3030. SCR4550. SCR6050
SMR系列千式多叡岑茨真空奈机塑
SMR SERIES MULTI STAGE ROOTS DRY VACUUM PUMP SE
采用岑茨豪+多叡岑茨千豪的机塑; 能耗小、 逆程温度可控、 曝音低 造合宍輪室、 護膜、 半写体等 度用。 抽速： 6 3 2 ~ 6 0 3 2 m ^ { 3 } / \mathsf { h } ま 桜限圧力: <=slant 0 . 1 Pa.abs.
Using Roots pump ^ + multi-stage Roots dry pump unit, Low energy consumption, process temperature control.
low noise. Suitable for Laboratory. coating, semiconductor applications. Pumping speed. 632-6032 m3h;
Uitimate pressure? <=slant O.1Pa.abs.
机型 Models: SMR632. SMIR1232. SMR1832 SMIR3032. SMR4532. SMIR6032
JD系列千式双申机螺杵真空奈机塑SERIES DUAL MOTOR DRY DRY SCREW VACUUM PUMP SET
立式双申机真躯无油螺杵真空奈机塑: 采用立式詰杓, 粉坐和夜体通迅性好: 双鞋子真躯控制，去歯蜷100无油: 鞋子軸心冷却，寸程温度可控。遣用于航空航夭、 化工医菊、 宍弘室等位用。抽速：170-1560 m ^ { 3 } / h 日 板限圧力：<0.1Pa.abs.
Vertical double motor direct drive oil-free Screw vacuum pump Unit, Adopts vertical structure, good dust and liquid passability, Double Fotor direct drive control. 100 % oil free gear removal, The rotor axis is cooled and the process temperature is controllable. Suitable for aerospace. Chemical medicine, laboratory and Other applicar tions. Pumping speed. 170-1560 m3/h, Uitimate pressure: <=slant O.IPa.abs.
机型 Models: JDi70. JD630. JD1560
SXH察列千式変徭変距螺杵真室奈机塑
H SERIES VARIABLE DIAMETER VARIABLE PITCH DRY SCREW VACUUM PUMP Sé
采用岑茨奈変径変距的千式螺杵真空豪的多段抽空机塑, 常只単奈、2段式、 3段式机望： 更加苫能、 低喋和低排与温度 造用千鯉申、 化工医菊、 光伏、 半号体等位用。 抽速: 1382-7203m'/h; 板限圧力: <=slant 0 . 1 1 a.abs.
Using Roots pump ^ + Variable diameter and variable distance dry screw vacuum pump mutti-stage pumping unit, Cormon Ssingle pump, 2 stage. I stage Unit, More energy saving. low noise and low exhaust temperature, Ssuitable for lithium, chemical and pharmaceutical, photovottaic, semiconductor and other applictons.Pumping Speed: 1382-7203m'h Ultimate pressure <=slant 0 . 1 \mathsf { P } .abs.
机型 Models: SKH1382. SXH2202. SXH3002. SXH4202 SXH6002. SXH7202. SXH4203. SXH7203
SX系列千式変徭変距螺杵単奈机塑
X SERIES VARIABLE DIAMETER VARIABLE PITCH SINGLE DRY SCREW PUMP SET
采用変径変距的千式螺杵真空奈的単奈机塑 更加苫能、 低曝和低排与温度 遣用于理串、 化工医菊、光伏、半尋体等度用。抽速：160-800m/h: 板限圧力： <=slant 0 . 1 1 a.abs.
The single pump unit with variable diameter and variable pitch dry screw Vacuum pump more energy saving. low noise and low exhaust temperature, Which is suitable for Lithium battery, chemical medicine, photovoltaic, Semiconductor and other applications. Pumping speed. 160-800m'h, Limit pressure: <=slant 0.1Pa.abs.
机型 Models: Sx160 SX300. Sx500. Sx800
JF烝列千式軸冷双躯型螺杵真室奈机塑 JF SERIES SHAFT COOLED DUAL DRIVE DRY SCREW VACUUM PUMP SET
来用軸心燈却技木的千式螺干真室奈的単奈机塑: 忌臂梁鞋子鈷杓授辻 方便準把 遣用千光伏、 半尋体等位用。抽速： 6 5 0 m ^ { 3 } / h 中駅 限圧力： <=slant O.1Pa.abs.
The single-pump unit of the dry screw Vacuum pump adopting axial cooling technology features a cantilever beam rotor structure design, which í Corveriert for maintenance and Suitable for applications such ” photovoltaic and semiconductor. Pumping speed. 6 5 0 m ^ { 3 } / h ; Limit pressure: <=slant O.1Pa.abs.
机型 Models: JF650
UJM奈列超高真空須合分子奈 UJM SERIES ULTRA HIGH UACUUM COMPOSITE MOLECULAR PUMP
抽速： 2 0 0 0 { - } 4 5 0 0 m ^ { 3 } / h 板限氏力: <=slant O.]Pa.abs. Pumping Speed: 2000-4500m'h Uitimate pressure! <=slant O.IPa.abs.
机型 Models: Ujm-2000. UJM-4500
UCM系列磁忌浮須合分子奈UCM SERIES MAGNETIC LEVITATIONCOMPOSITE MOLECULAR PUMP
抽速: 1200-4500m'/h:
板限圧力 <=slant O.1Pa.abs.
Pumping Speed. 1200-4500m'hUltimate pressure. <=slant O.1Pa.abs.
机型 Models: UCM-1200. UCM-2700.UCM-3300. UCM-4500
ス承技ボ
SV系列千式等径変距螺杵単奈机祖
SV SERIES-EOUAL DIAMETER VARIABLE PITCH SINGLE DRY SCREW PUMP SET
活用行巫斑景 APPLICABLE INDUSTRY SCENARIOS
技木性能 TECHNICAL PERFORMANCE
大抽速千式螺杵真空豪，変距鞋子型授辻 功耗更低:彩用水冷申枳 ^ { , + } 変頻亟劫， 抽速凋苫范国罠 工況活位性更好:全袞水却売体授辻 豪体和揖与温度可控、 音更低。
| 机型Mode! | 単位 Unit | 80 | 180 | 200 | 300 | 380 | 450 | 580 | 680 | 950 | 1200 | 1500 | 2500 | |
| 80 | 180 200 | 300 | 380 | 450 | 580 | 680 | 950 | 1200 | 1500 | 2500 | ||||
| 及限圧力 Uitimate Pressure | Torr | 75x10-- | ||||||||||||
| mbar | -1×10-2 | |||||||||||||
| Pa | 1 | |||||||||||||
| Hz | 50 | |||||||||||||
| 220-380 | ||||||||||||||
| 額定功率 Rated Fowver | kw | 45 | 75 | 15 | 22 | 22 | 37 | 55 | ||||||
| 接口 Corneclicn | 辻気口 Iinlet | KF50 | 1S063 | 1s0100 | 1S0125 | 1s0150 | ||||||||
| 排五口 Outlet | NW40 | Is063 | 1S080 | 1s0100 | ||||||||||
| 永 | 3-8 | 610 | 15-20 | 25-30 | ||||||||||
| Pressure | ||||||||||||||
| 温度 Termperature | 18-30 | |||||||||||||
| 毎与 N | ほカre | bar | 15-2.0 | |||||||||||
| 鎮流景 | LImin | 0-60 | ||||||||||||
| S幇流 | LImin | 0-20 | ||||||||||||
| Swagelok 14“ | ||||||||||||||
| 曝音 Noie | dB(A) | -70 | 75 | “80 | -82 | -85 | ||||||||
| 真空豪贔大漏率 | Pa.m'Is | 1×10-5 | ||||||||||||
| 室温操作范国 Operating Temperature | 5-40 | |||||||||||||
SVRISVH系列千式等径変距螺千真室奈机塑
SVRISVH SERIES-EOUAL DIAMETER VARIABLE PiTCH DRY SCREW VACUUM PUMP SET
活用行兆斑景 APPLICABLE INDUSTRY SCENARIOS
技木性能 TECHNICAL PERFORMANCE
伐化西蝦配比 満足寮抽速范国、流量変化更加穏定可控:自主丑麦函叡変蜘咲劫、 工況自遣位控制程序 満足不同工況抽速需求;采用一体化黠杓授辻 黠杓察湊，安装空司活位性更好。
| 机型Mode! | 単位 Unit | 782 | 1382 | 1682 2202 | 4202 | 4952 | 6002 | 6302 7252 | ||
| mıh | 182 | 1382 | 1682 | 2202 | 4202 | 4952 | 6002 | 6302 1252 | ||
| Torr | -7/5x10-4 | |||||||||
| mbar | =1x10- | |||||||||
| Pa | -01 | |||||||||
| Hz | 50 | |||||||||
| 接口 | 220-380 | |||||||||
| 額定功率 Rated Power | 45+2 45+4.5 | 4.5+4,5 | 6+45 | 6+6 | 11+75 | 15+75 | 15+11 | 22+15 | ||
| 辻気口 Inlet | 1s0160 | 1s0200 | 1S0250 | |||||||
| Carnecticn | 排与口 Outlet | NW40 | IS0ó3 IS0ó3 | |||||||
| LImin | 3-8 | ó-10 | 10-15 | 15-20 | ||||||
| ミカre | bar | 2-4 | ||||||||
| 温度 Temperature 圧力 | ö℃ | 18-30 | ||||||||
| 気与 N; | Pressure 五鎮流量 | bar | 15-2.0 | |||||||
| Flow Dilute | LImin | 0-60 | ||||||||
| LImin | 0-20 | |||||||||
| Coさton 曝音 | Swagelok 14" | |||||||||
| Naise | dB(A) | -70 | -72 | -80 | ||||||
| 真空豪景大漏率 | Pa.m'Is | 1×10-5 | ||||||||
| 室温操作范国 Operatirng Temperature | “ć | 540 | ||||||||
乙承技ボ
SFR系列千式増弼螺杵真室奈机塑
SFR SERIES ENHANCED DRY SCREW VACUUM PUMP Sé
遣用行兆珈景 APPLICABLE INDUSTRY SCENARIOS
技木性能 TECHNICAL PERFORMANCE
首創基于双斗対称型銭的増彊型螺杵授辻 結杓更合理， 近行更平穏、 更苦能:与体通路短， 抗粉坐性能弼遣用于鍍膜工;
豪体的温度可控」 可以針対客弓工琶辻行定制化授辻。
| 机型Model | 単位 Unit | 652 | 1252 | 1852 | 3052 | 4552 | 6052 | |
| 名叉抽速 Speed Purnpirg | mh | ó52 | 1252 | 1852 | 3052 | 4552 | 6052 | |
| 桜限用カ(業気) | Pa | -05 | ||||||
| 水冷密封 申机 Water Cooling Motor | 千豪額定功率 BP Rated Power | kw | 45 | 45 | 45 | 11 | 11 | |
| 岑茨豪額定功率 DP Rated Fowver | 45 | 45 | 75 | |||||
| 220-380 | ||||||||
| 接口 Connection | 辻与口 Irlet. | s0100 | 1S0160 | 1s0200 | 1s0250 | |||
| 排与口 Outlet | NW40 | |||||||
| 冷却水 Cooling Water | 流量 Qutlet | LImin | 4-8 | 5-8 | 610 | 12-15 | ||
| eミカre | bar | 2-4 | ||||||
| Tem高ure | 10-30 | 10-25 | ||||||
| 接斗 Connecticn | RC3/8" | |||||||
| 気与 N; | 圧力 Pressure | bar | 15-20 | |||||
| 与鎮流量 Dilute Flow | Lmin | 50-65 | ||||||
| 密封流量 Flaw Sealing | LImin | 4-10 | ||||||
| 接 Connection | Swagelok 14" | |||||||
| 曝音 Noise | dB(A) | -70 75 | ||||||
| 真空奈最大漏率 | Pa.m'iIs | 1x10- | ||||||
| MLP 混操作范里 | ”ć | 5-40 | ||||||
SCR系列千式隻合爪式真室奈机祖
SCR SERIES COMPOSITE CLAW DRY VACUUM PUMP SET
活用行巫斑景 APPLICABLE INDUSTRY SCENARIOS
技木性能 TECHNICAL PERFORMANCE
鬘合爪式結杓, 負義多扱分配， 乱粉坐能力弼;彩用全水冷二合一変蜘亟劫， 申控丞銃密封等霰高防坐防水散執性好 躯劫更苫能。
| 机型Mode! | 単位 Unit | 610 | 1210 | 1820 | 3030 | 4550 | 6050 | ||
| Pumping | mh | é10 | 1210 | 1820 | 3030 | 4550 | 6050 | ||
| 板限庄力(美与) Ultimate Pressure | Pa | -01 | |||||||
| 水桧密封 Motor Cooling | 千豪額定功率 BP Rated Power | kw | 45 | 45 | 75 | 75 | 11 | 11 | |
| 容茨泰額定功率 | kw | 45 | 45 | 75 | |||||
| 申氏 Yoltage | 220-380 | ||||||||
| 接口 Connection | 辻与口 Inlet | IS0160 | 10200 | 1S0250 | |||||
| 排口 Qutlet | NW40 | ||||||||
| 冷却水 Cooling Water | 流量 Outlet | LImin | 2-11 | ||||||
| eミ九re | bar | 2-4 | |||||||
| Temさture | ”ć | 15-25 | |||||||
| 接斗 Conrectiar. | RC3/8“ | ||||||||
| 気与 N | 圧力 Pressure | bar | 2-4 | ||||||
| 与鎮流量 Dilute Flow | Lmin | 50-100 | |||||||
| 密封流量 Flaw! Sealing | L/min | 4-10 | |||||||
| 接 Connection | Swagelok 1I4" | ||||||||
| 音 Noise | dB(A) | -70 -75 | |||||||
| 真空室奈最大漏率 MLP | Pa.m'is | 1x10- | |||||||
| 混操作范 | ć | 5-40 | |||||||
ス技ボ
SMR系列千式多叡岑茨真室奈机塑
VSMR SERIES MULTI STAGE ROOTS DRY VACUUM PUMP SET
活用行巫斑景 APPLICABLE INDUSTRY SCENARIOS
技木性能 TECHNICAL PERFORMANCT
多扱綬辻 透行功耗更苦能:彩用全水燈二合一変嫡躯劫 申控察銃密封等叡高, 防坐防水散熟性好 躯劫更帝能。
| 机型Mode! | 単位 Unit | 632 | 1232 | 1832 | 3032 | 4532 | 6032 | ||
| 来連 | mh | ó32 | 1232 | 1832 | 3032 | 4532 | 6032 | ||
| 板限庄力(美五) Ultirmate Pressure | Pa | ||||||||
| 水桧密封 Motor | 千豪額定功率 BP Rated Fowver | kw | 3 | ||||||
| 容茨豪額定功率 | kw | 45 | 45 | 75 | 75 | ||||
| 申圧 Yoltage | 220-380 | ||||||||
| 接口 Conrection | 辻与口 Irlet | 1s0160 | 1s0250 | ||||||
| 排与口 Qutlet | NW40 | ||||||||
| 冷却水 Cooling Water | 流量 Outlet | LImin | 4-8 | 5-8 | 610 | 12-15 | |||
| bar | 2-4 | ||||||||
| Tem高ure | “ć | 10-30 | |||||||
| 接斗 Conrection | RC3/8" | ||||||||
| 気与 N. | eミカre | bar | 2-6 | ||||||
| 与槙流量 Dilute Flow 密封流量 | LImin | 50-100 | |||||||
| Flow Sealing | LImin | 0-10 | |||||||
| 接 Connection | Swagelok 14" | ||||||||
| 喋音 Noise | dB(A) | 70 | |||||||
| 真空豪最大漏率 MLP | Pa.m'Is | 1×10- | |||||||
| 毒温操作范毘 | ć | 5-40 | |||||||
JD系列千式双申机螺杵真空奈机塑
活用行此斑景 APPLICABLE INDUSTRY SCENARIOS
技木性能 TECHNICAL PERFORMANCE
立式双申机真躯无油螺千真空豪机塑采用立式詰杓，粉坐和液体通団性好：双鞭子宣亟控制， 去歯彰100％无油:鞍子軸心冷却，泣程温度可。遣用于航空航夭、 化工医珣、 宍輪室等位用。
JD SERIES DUAL MOTOR DRY SCREW VACUUM PUMP SET
| 机型Mode! | 単位unit | JD170 | JD630 | JD1560 | ||
| 名叉抽速 Pumping Speed | mh | 170 | ó30 | 1560 | ||
| 板限圧力 Ultirate Pressure | Torr | -7/5x10-3 | ||||
| mbar | 1x10-2 | |||||
| Pa | 1 | |||||
| 水冷密封 毘机 Water. Mator Cooling | Hz | 50 | ||||
| 380 | ||||||
| 額定功率 Rated Fuwer | kw | 15 | 22 | 4- | ||
| 接口 Connection | 1s0100 | 1s0160 | ||||
| 排与口 Outlet' | IS0é3 | 1s080 | ||||
| 冷却水 Coolirg Water | 流 | LImin | ó-10 | 10-15 | ||
| 圧力 Pressure | bar | 2-4 | ||||
| 温度 Temperature | ”ć | 18-30 | ||||
| 気与 N; | bar | 15-2.0 | ||||
| LImin | 0-60 | |||||
| LImin | 0-20 | |||||
| Coをイion | Swagelok 14" | |||||
| 音 Npige | 本B(A) | 70 | ||||
| 真空豪最大漏率 MLP | Pa.m'is | 1×10- | ||||
| 室温操作范国 Operating Temperature | ”ć | 5-40 | ||||
ス承技ボ
SX烝列千式変徭変距螺杵単奈机塑
活用行巫斑景 APPLICABLE INIDUSTRY SCENARIOS
技木性能 TECHNICAL PERFORMANCE
来用先辻的変径変距轄子授辻 内圧比超団5.0
更加苫能、 低燥和低排与温度 遣用于鯉申、 化工医菊、 光伏、 半尋体等位用。
| 机型Mode! | 単位unit | 160 | 300 | 500 | 800 | ||
| 名文抽速 Pumping Speed | mh | 160 | 300 | 500 | 800 | ||
| Torr | -75x10- | ||||||
| mbar | -1×10-2 | ||||||
| Pa | “1 | ||||||
| 水冷密封 申机 Water Cooling Motor | Hz | 50 | |||||
| 220-380 | |||||||
| kい | 45 | 11 | 22 | ||||
| 接口 Connection | 海 | Is063 | 1s0100 | ||||
| NW40 | KF50 | ||||||
| 冷却水 Cooling Water | 流 | LImin | 4-8 | 6-10 10-15 | |||
| 圧力 Pressure | bar | 2-4 | |||||
| 気与 N | 温度 Terrperature | ć | 18-30 | ||||
| 圧力 Pressure | bar | 15-2.0 | |||||
| 五鎮流量 | LImin | 0-60 | |||||
| LImin | 0-12 | ||||||
| Coさon 喋音 | Swagelok 14" | ||||||
| Noise | dB(A) | 65 -70 | |||||
| 真空奈最大漏率 | Pa.m'Is | 1×10-” | |||||
| 室温操作范囲 Operatirg Termperature | “ć | 540 | |||||
SXH系列千式変径変距螺杵真室奈机塑
更加苫能、 低喋和低排温度 遣用于鯉申、 化工医菊、 光伏、 半尋体等位用。
| 机型Model | 単位unit | 1382 | 2202 | 3002 | 4202 | 6002 | 7202 | 4203 | 1203 | |
| 名叉抽速 Pumping Speed | mıh | 1382 | 2202 | 3002 | 4202 | 6002 | 1202 | 4203 | 1203 | |
| 板限圧力 Uitimate Pressure | Torr | 75x10-4 | ||||||||
| mbar | -1x10- | |||||||||
| Pa | -01 | |||||||||
| 水冷密封 申机 Water Motor Cooling | 供申釿率 Frequency | Hz | 50 | |||||||
| 串圧 Voltage | 220-380 | |||||||||
| 額定珈率 | kw | 4.5+4.5 6+45 | 6+6 | 6+75 | 11+75 | 22+11 | 4.5+4.5+75 | 6+7:5+11 | ||
| 接口 Connection | 1s0160 | 150200 | 1s0250 | |||||||
| NW40 | KF50 | NW40 | ||||||||
| 冷却水 Cooling Water | LImin | 3-8 | 8-12 10-15 | |||||||
| 圧力 Pressure | bar | 2-4 | ||||||||
| 温度 Temperature | “ć | 18-30 | ||||||||
| 気与 N; | 圧力 Pressure | bar | 1,5-20 | |||||||
| 徳流景 | LImin | 0-60 | ||||||||
| Limin | 0-12 | |||||||||
| 接斗 Cornection | Swagelok 114“ | |||||||||
| 音 Noe | dB(A) | “65 -75 | ||||||||
| 真空豪最大漏率 MLP | Pa.m'is | 1×10-” | ||||||||
| 室温操作范国 Operating Temperature | ”ć | 5-40 | ||||||||
ス承技ボ
JF系列千式軸澄双亟型螺杵真室奈机塑
技木性能 TECHNICAL PERFORMANCE
JF SERIES SHAFT COOLED DUAL DRIVE DRY SCREW VACUUM PUMP SET
鞋子軸心燈却 ^ + 売体桧却 介風内外温度平衡:忌臂梁鞍子佶杓綬辻，方便折卸和:永磁同歩双申机亟劫, 若能高数。
活用行兆斑景 APPLICABLE INDUSTRY SCENARIOS
| 机型Model | 単位 Unit | 650 | |
| 来連 | m'h | 650 | |
| Torr | |||
| 板限圧力 Ultimate Pressure | mbar | 1×10-2 | |
| Pa | 1 | ||
| 申机 Motor | Hz | 50 | |
| 申圧 Vottage | 380 | ||
| 額定功率 Rated Power | kw | 75+75 | |
| 接口 Carrhctian | 辻気口 Inlet | 1s0100 | |
| 排与口 Outlet | 1s080 | ||
| 冷却水 Cooling Water | LImin | 6-10 | |
| 圧力 Pressure | bar | 2-4 | |
| Tam湯度ure | 18-30 | ||
| 気与 N | ミカ力re | bar | 115-2.0 |
| LImin | 0-60 | ||
| Sealing | LImin | 0-20 | |
| Swagelok 14' | |||
| 意 | dB(A) | “80 | |
| 真空奈最大漏率 MLP | Pa.m'is | 1×105 | |
| 室温操作范国 Operatirng Temperature | 'ć | 5-40 | |
UJM系列超高真空須合分子奈
遣用行兆斑景 APPLICABLE INDUSTRY SCENARIOS
技木性能 TECHNICAL PERFORMANCE
陶盗球軸承t脂淘滑不会芹生申礎千抗 整体型須合子，井配髷漏範抽与叡和螺旋槽筒式牽引靫 可耐受較高的前叡圧力
| 型号Mode! | UJM-2000 | UJM-4500 | |
| 法堂却格 Flange specification | 海 Inlet | 1s0-250 | 1s0-400 |
| 指 outlet | KF40 | KF40 | |
| 抽速 Speed Purnping | N2 | 2000L/S | 4500LIS |
| N2 | 1×10: | 1x10: | |
| 圧縮比 Compression ratio 板限圧力 Uitimate Pressure | H2 | 4x10: | 4×103 |
| 金属密封 Metal sea! | 5x10-7Pa | 5x10-7Pa | |
| Marirrum. | 2Torr | 2Torr | |
| 24000rfmin | 21000rImin | ||
| 水Å Water coolirng | 水澄 Water cooling | ||
| IS0-Rc114 | ISO-Rc114 | ||
| 流 | 3L/min | 3L/min | |
| Watarkaeratre | |||
| 吹打 (逸配) Purging foptional | F-persetr | KF10 | |
| 40+10sccm | 40+10sccm | ||
| 通信接口 Comrrunication interface | 0 Remote RS232/RS485 | 110 Remote RS232/RS485 | |
| 串圧 Voltage | 220V+10％ | 220V土10% | |
| 最大功率 Maximum power | 1KVA | 1KVA | |
| 重量 Weight | 432KG | 80KＧ | |
| 淘滑油量 Lubricting oil quanty | 无油 Oil-free | 无油 0itl-free | |
| 余屋逸配 Coating selection ard configuration | 特殊途屋 Special coating | 特殊塗屋 Special coating | |
| 安装方式 Irnstallatior method | 任意角度 Any Angle | 任意角度 Any Angle | |
| 泣用 Application | PVDI真空護膜I宍瞼室位用等 PVD! vacuum Coatingllaboratory applications, etc | ||
ス承技ボ
UCM系列磁忌浮須合分子奈
活用行兆斑景 APPLICABLE INDUSTRY SCENARIOS
技木性能 TECHNICAL PERFORMANCE
礎忌浮軸承、 工作寿命更長:
无油脂、无接触摩擦，更苫能:
任意角度安装 便于丞銃集成、 察湊型黠杓。
UCM SERIES MAGNETIC LEVITATION COMPOSITE MOLECULAR PUMP
| 型号Mode! | UCM-1200 | UCM-2700 | UCM-3300 | UCM-4500 | |
| 法当却格 逸 inlet | 1s0-200 | 1s0-250 | 1S0-320 | 1s0-400 | |
| Flange. Specification 排outlet | KF40 | KF40 | KF40 | KF40 | |
| eed N2 Furnping | 1200L/S | 2700LS | 3300LIS | 4500LIS | |
| 圧縮比 N2 Compression | 21x10” | >1x108 | 21x10: | 1x10: | |
| Tatig H2 | 21×10: | 21×10: | 1x10“ | 21x10“ | |
| 5x10-pa | 1x10-pa | 1x10rpa | 1x10rpa | ||
| 最太出日（前祭)馬力 | 15Torr | 21orr | 21or | 2Torr | |
| Mo連eed | 36000rpm | 27000rpm | 27000rpm | 24000rpm | |
| 任意角度 Any Angle | 任意角度 Any Angle | 任意角度AÅIý Angle | 任意角度 Any Angle | ||
| Cooling | 水澄 Water cooling | 水Å Water Cooling | 水Å Water cooling | 水冷 Water cooling | |
| 冷却水 Water | ISO-RC1/4 | ISO-RC114 | IS0-Rc1/4 | ISO-RC1l4 | |
| 流景 | 3LImin | 3LImin | 3L/min | 3LImin | |
| Weterkaerture | 16-25“℃ | 16-25“℃ | 16-25“℃ | 1-25“℃ | |
| 吹拍 Purging | Ppe eter 流景 | KF16 | KF10 | KF10 | KF10 |
| 通信接口 Corraunication | 30+10sccm | 40+10sccm | 40+10sccm | 40+10sccm | |
| 申圧 Voltage | 1/0 Remote RS232/RS485 | Ho Remote RS232/RS485 | /o Remote RS232/RS485 | o Remote RS232/RS485 | |
| (洗配) | 220V+10％ | 220V+10％ | 220V+10％ | 220/+10％ | |
| 特殊途屋8ei! 38:5kG | 特殊浄屋ei | 特殊途屋 80el | 特殊途居 oeia! | ||
| Weight | O.T5KVA | 85KＧ 1.8KVA | 80KG 18KVA | 85KＧ 1.8KVA | |
| 最大功率 Maximum power 位用 Applicatior. | 葛子注入/半尋体成膜/刻融等 Jon implartatior] semiconductor film formationetching. etc | ||||
塗屋防
COATING PROTECTION
針対各神特殊制程位用 可定制相対位的途屋, 以送到良好的防択数果
FOR VARIOUS SPECIAL PROCESS APPLICATIONS, THE CORRESPONDING COATINGS CAN BE CUSTOMIZED TO ACHIEVE GOOD PROTECTION EFFECT
SERVICE 服矛
真空解决方案麦家
惣的期望是最兵的役雀穏定透行肘同和最小的息透行成本 我仰不断努力宍斑返呰目椋。
我仰了解真空装髷和豪銃在突院工琶中的位用 提供伐展的授辻方案和麦此的定制 能竪済珠保的方式長肘同的穏定透行
YOUR EXPECTATION ? THE LONGEST STABLE RUNNING TIME AND THE LOWEST TOTAL OPERATING COST, WE ARE CONSTANTLYSTRIVING 10 ACHIEVE THESE GOALS.
WE HAVE A GOOD UNDERSTANDING OF THE APPLICATION OF VACUM PUMP AND SYSTEM IN THE ACTUAL PROCESES ANDWE CAN PROVIDE HIGH-QUALITY DESIGN SOLUTIONS AND PROFESSIONAL CUSTOMIZED SERVICES, T0 ENSURE THAT THEPUMP CAN RUN STABLY FOR A LONG TIME IN AN INTELLIGENT, ECONOMICAL ANDENVIRONMENTALLY FRIENDLY MANNER.
真室奈進修VACUUM PUMP MAINTENANCE
提供自主及井口真室奈保兼、 雛修及魯后服努。
PROVIDE INDEPENDENT AND IMPORTED VACUUM PUMP MAINTENANCE REPAIR AND AFTER-SALES SERVICE.
